the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested. Radial Line Slot Antennas - Home - Springer Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and millimeter wave bands. Linearly polarized arrays Radial Line Slot Antennas | SpringerLink Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ...
Request PDF on ResearchGate | Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments | The radial line slot antenna plasma source is a ...
On the Near-Field Shaping and Focusing Capability of a Radial ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION Microwave power coupling in a surface wave excited plasma density plasma can form with an ion sheath layer along the antenna. Then the microwave was fed into the coaxial wave-guide from the right side of the system. Now the input microwave power could propagate easily along the negative biased antenna and surface wave excited plasma generated along the antenna inside the chamber. Simulation of microwave pulsing in a radial line slot antenna ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.
Design of a Concentric Array Radial Line Slot Antenna for ... - NSFC
A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA isConcentric slot pairs arranged RLSA. Wide-Band RLSA. 60GHz Wireless LAN System. Microwave Plasma Etching System & Plasma CVD for the...
Open access peer-reviewed chapter. A Reconfigurable Radial Line Slot Array Antenna for WiMAX Application. By Mohd Faizal Jamlos.Reduction of Nonlinear Distortion in Multi-Antenna WiMAX Systems.
Planar antenna and antenna array - Ricoh Company, Ltd. A tapered slot plane antenna apparatus for a millimeter wave radio communication system which provides a tapered pattern composed by utilizing a Fermi-Diac distribution function so as to consider an i US4792810A - Microwave antenna - Google Patents Other proposed antenna designs are a radial line slot array antenna, and a waveguide slot array antenna. These antennas tend to have reduced dielectric and radiation losses, as compared to the microstrip line feed array antenna. US6812895B2 - Reconfigurable electromagnetic plasma waveguide…
Acting as local linear polarizers, these slot antennas enable the spatial modulation of optical fields in amplitude, phase, and polarization for the cross- polarized ...
Design of Radial Line Slot Antennas at 8.3 GHz for Large ... The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications. JSAP was ...
source reconstruction of a K-band radial line slot antenna (RLSA), and measured results are presented, compared with the designed data. Of course, this algorithm can be also be used for other kind of antennas as patch arrays. 1. Introduction One of the important parameters in antenna diagnosis is the field distribution on the antenna aperture. Large-area plasma excitation in densely arrayed radial line ... A novel feeding structure using a TE 11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed ... Design of Radial Line Slot Antennas at 8.3 GHz for Large Area ... A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field.